High-Performance MEMS Flow Sensor Modules

IDT's mass flow sensor modules are ideal for use in the industrial process, healthcare and medical, and automotive markets

Image of IDT's FS1012/2012 High-Performance MEMS Flow Sensor ModulesSolid-state mass flow sensor modules from IDT measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, IDT flow sensors deliver excellent abrasive wear resistance and long-term reliability.

IDT offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.

Features
  • Measures gas or liquid flow 
  • MEMS thermopile sensing
  • Silicon-carbide coating over MEMS flow sensor
  • Robust solid isolation technology
  • No cavity in MEMS element to cause clogging
  • Resistant to vibration and pressure shock
  • High accuracy, high sensitivity
  • Fast response time
  • Easy cleaning and sterilization
  • 3 VDC to 5 VDC supply options
  • Food-grade compatible version
Applications
  • Industrial process
  • Healthcare
  • Medical devices
  • Automotive systems

High-Performance MEMS Flow Sensor Modules

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
FS2012-1100-NG datasheet linkCALIBRATED MASS FLOW SENSORFS2012-1100-NGCALIBRATED MASS FLOW SENSOR219 - Immediate
FS2012-1100-NG product page link
FS1012-1001-LQ datasheet linkTHERMAL MASS FLOW SENSORFS1012-1001-LQTHERMAL MASS FLOW SENSOR117 - Immediate
FS1012-1001-LQ product page link
FS1012-1002-LQ datasheet linkTHERMAL MASS FLOW SENSORFS1012-1002-LQTHERMAL MASS FLOW SENSOR58 - Immediate
FS1012-1002-LQ product page link
FS1012-1100-NG datasheet linkTHERMAL MASS FLOW SENSORFS1012-1100-NGTHERMAL MASS FLOW SENSOR55 - Immediate
FS1012-1100-NG product page link
FS2012-1002-LQ datasheet linkCALLIBRATED MASS FLOW SENSORFS2012-1002-LQCALLIBRATED MASS FLOW SENSOR66 - Immediate
FS2012-1002-LQ product page link
FS2012-1001-LQ datasheet linkTHERMAL MASS FLOW SENSORFS2012-1001-LQTHERMAL MASS FLOW SENSOR53 - Immediate
FS2012-1001-LQ product page link
FS2012-1020-NG datasheet linkCALIBRATED MASS FLOW SENSORFS2012-1020-NGCALIBRATED MASS FLOW SENSOR50 - Immediate
FS2012-1020-NG product page link
FS1012-1020-NG datasheet linkTHERMAL MASS FLOW SENSORFS1012-1020-NGTHERMAL MASS FLOW SENSOR45 - Immediate
60 - Factory Stock
FS1012-1020-NG product page link
FS1023 datasheet linkLIQUID FLOW SENSOR MODULE, AMPLIFS1023LIQUID FLOW SENSOR MODULE, AMPLI20 - Immediate
FS1023 product page link
FS1025 datasheet linkLIQUID FLOW SENSOR MODULE, AMPLIFS1025LIQUID FLOW SENSOR MODULE, AMPLI20 - Immediate
FS1025 product page link
FS1027 datasheet linkLIQUID FLOW SENSOR MODULE, AMPLIFS1027LIQUID FLOW SENSOR MODULE, AMPLI20 - Immediate
FS1027 product page link

Evaluation Kits / Sensor Kits

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
SDAF02 datasheet linkFS2012 LIQUIDFLOW SENSOR EVALKITSDAF02FS2012 LIQUIDFLOW SENSOR EVALKIT48 - Immediate
SDAF02 product page link
SDAF01 datasheet linkFS2012 GAS FLOW SENSOR EVAL KITSDAF01FS2012 GAS FLOW SENSOR EVAL KIT16 - Immediate
SDAF01 product page link
Published: 2017-09-27
Updated : 2018-08-13